Study on Titanium Film Deposited on Steel Belt Surface via Evaporation
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摘要: 采用电子束真空蒸镀法,通过改变走带速度在钢带表面蒸镀沉积钛膜。采用XRD、FIB、划痕试验等方法对钛膜的物相组成及结构、截面形貌、膜基结合力进行了研究。结果表明:钛膜的晶体结构为密排六方结构,在不同走带速度下均呈现出强烈的(002)晶面择优取向。当走带速度由1 m/min提高到4 m/min时,钛膜的膜厚由744.7 nm提高到855.9 nm,膜基间的结合力呈快速下降后趋于平缓的态势,本试验范围内的最大结合力为24.78 N。Abstract: The titanium thin film was deposited via electron beam vacuum evaporation on the surface of steel belt by changing the tape travel speed. The phase composition and structure,cross-sectional morphology and film-base bonding force of the titanium film were studied by XRD,FIB,scratch test and other methods. The results show that the titanium film has a close-packed hexagonal structure,and it presents an intense preferred orientation at (002) lattice plane at different tape travel speeds. With the tape travel speed increased from 1 m/min to 4 m/min,the titanium film thickness increases from 744.7 nm to 855.9 nm,and the bonding force between the Ti-film and substrates decreases rapidly and then tends to be gentle. Within the tentative range,the maximum bonding force is 24.78 N.
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Key words:
- steel belt /
- titanium film /
- evaporation /
- electron beam
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