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射频等离子体制备增材制造用球形钛钽合金粉末

应真鸿 谭冲 施麒 李贵发 郑海忠 刘辛

应真鸿, 谭冲, 施麒, 李贵发, 郑海忠, 刘辛. 射频等离子体制备增材制造用球形钛钽合金粉末[J]. 钢铁钒钛, 2021, 42(3): 64-73. doi: 10.7513/j.issn.1004-7638.2021.03.010
引用本文: 应真鸿, 谭冲, 施麒, 李贵发, 郑海忠, 刘辛. 射频等离子体制备增材制造用球形钛钽合金粉末[J]. 钢铁钒钛, 2021, 42(3): 64-73. doi: 10.7513/j.issn.1004-7638.2021.03.010
Ying Zhenhong, Tan Chong, Shi Qi, Li Guifa, Zheng Haizhong, Liu Xin. Preparation of spherical titanium-tantalum alloy powder for additive manufacturing by radio frequency plasma[J]. IRON STEEL VANADIUM TITANIUM, 2021, 42(3): 64-73. doi: 10.7513/j.issn.1004-7638.2021.03.010
Citation: Ying Zhenhong, Tan Chong, Shi Qi, Li Guifa, Zheng Haizhong, Liu Xin. Preparation of spherical titanium-tantalum alloy powder for additive manufacturing by radio frequency plasma[J]. IRON STEEL VANADIUM TITANIUM, 2021, 42(3): 64-73. doi: 10.7513/j.issn.1004-7638.2021.03.010

射频等离子体制备增材制造用球形钛钽合金粉末

doi: 10.7513/j.issn.1004-7638.2021.03.010
基金项目: 国家外国专家项目(G20200130024);广东省重点领域研发计划(2018B0909040004-5);广州市重点领域研发计划(202007020008);广州市对外科技合作(201907010030)
详细信息
    作者简介:

    应真鸿(1996—),男,汉,江西南昌人,硕士研究生,主要从事金属粉体制备及其近净成形制造研究,E-mail:804270370@qq.com;

    通讯作者:

    刘辛,男,汉,教授级高级工程师,主要从事金属粉体制备及其近净成形制造研究。E-mail:liuxin@gimp.gd.cn

  • 中图分类号: TF823

Preparation of spherical titanium-tantalum alloy powder for additive manufacturing by radio frequency plasma

  • 摘要: 采用射频等离子体球化技术对氢化破碎不规则形貌的钛钽合金粉末进行球化处理,研究了送粉速率、载气流量和鞘气中氦气流量等工艺参数对钛钽合金粉末球化率、粉体性能和显微结构的影响,并开展了球化后钛钽合金粉末选区激光熔化成形适用性评价。结果表明:经过射频等离子体球化处理后,粉末截面组织由板条状α″-Ti和胞状β-Ti组成,球化率在98%以上,粒度分布变宽,平均粒径由球化前21.41 μm增大至32.3 μm。粉末球化率受送粉速率、载气流量和鞘气中氦气流量等因素影响,当送粉速率为35 g/min,载气流量为5.5 L/min,鞘气中氦气流量为40 L/min,球化效果最好。与原料粉末相比,球化后粉末的霍尔流速(50 g计)为6.27 s,松装密度由1.38 g/cm3提高至3.11 g/cm3,振实密度由2.54 g/cm3提高至3.48 g/cm3。此外,球化后的钛钽合金粉末具有良好的选区激光熔化适用性,成形后制件致密度大于99%,微观组织为针状α″-Ti和胞状β-Ti,钛、钽元素分布均匀,无未熔融的钽颗粒,显微硬度(HV)达到725。
  • 图  1  钛钽合金粉末球化处理前后形貌

    (a)球化前;(b)球化后;(c)球化后粉末截面;(d)球化后粉末开裂缺陷

    Figure  1.  SEM images of titanium-tantalum alloy powder

    图  2  粉末EDS能谱

    (a)扫描电子显微镜图像;(b)钛元素分布;(c)钽元素分布

    Figure  2.  EDS of powders

    图  3  钛钽合金粉末球化前后XRD图谱

    Figure  3.  XRD patterns of titanium-tantalum alloy powder before and after spheroidization

    图  4  钛钽合金粉末球化前后粒度分布

    Figure  4.  Particle size distribution of titanium-tantalum alloy powder before and after spheroidization

    图  5  不同送粉速率下球化钛钽合金粉末的SEM形貌

    Figure  5.  SEM images of titanium-tantalum alloy powder prepared at different powder feeding rates

    (a) 28 g/min; (b) 35 g/min; (c) 42 g/min

    图  6  不同载气流量下球化钛钽合金粉末的SEM形貌

    Figure  6.  SEM images of titanium-tantalum alloy powder prepared at different carrier gas flow rates

    (a) 3.0 L/min; (b) 5.5 L/min; (c) 7.0 L/min

    图  7  不同载气流量下球化钛钽合金粉末的截面组织

    (a) 3.0 L/min;(b) 7.0 L/min;(c) 为(a)的局部区域放大;(d)为(b)的局部区域放大

    Figure  7.  Cross-section microstructure of titanium-tantalum alloy powder prepared at different carrier gas flow rates

    图  8  不同氦气流量下球化钛钽合金粉末的SEM形貌

    Figure  8.  SEM images of titanium-tantalum alloy powder prepared at different sheath gas (He) flow rates

    (a) 0 L/min; (b) 20 L/min; (c) 40 L/min

    图  9  选区激光熔化制备钛钽合金的密度随激光能量密度的变化曲线

    Figure  9.  Relative density of SLM-processed Ti-Ta alloys fabricated by different laser energy densities

    图  10  SLM打印钛钽合金试样的XRD谱图

    Figure  10.  XRD patterns of SLM-processed Ti-Ta alloys

    图  11  SLM打印钛钽合金试样的组织结构

    (a)本试验;(b)其他文献[23]

    Figure  11.  Microstructure of SLM-processed Ti-Ta alloys

    图  12  SLM打印钛钽合金试样的电子显微镜形貌

    Figure  12.  SEM morphology of SLM-processed Ti-Ta alloys

    图  13  打印试样表面EDS能谱

    (a)扫描电镜图像;(b)钽元素分布;(c)钛元素分布

    Figure  13.  EDS of SLM-processed Ti-Ta alloys

    图  14  SLM成形钛钽合金试样的维氏硬度随激光能量密度变化曲线

    Figure  14.  Vickers hardness of SLM processed Ti-Ta alloys fabricated by different laser energy densities

    表  1  原料钛钽合金粉末化学成分

    Table  1.   Chemical composition of raw titanium-tantalum alloy powder %

    TiTaHOC
    Bal.28.242.840.850.024
    下载: 导出CSV

    表  2  射频等离子体球化工艺参数

    Table  2.   Experimental parameters for RF plasma spheroidization

    功率/kW鞘气流量1(Ar)/(L·min−1)鞘气流量2(He)/(L·min−1)载气流量(Ar)/(L·min−1)送粉速率/(g·min−1)
    20~4030~5020~403~728~42
    下载: 导出CSV

    表  3  选区激光熔化成形参数

    Table  3.   SLM process parameters used for this study

    编号激光功率/W扫描速度/(mm·s−1)层厚/μm扫描间距/μm激光能量密度/(J·mm−3)
    1804003060111.11
    21204003060166.66
    31604003060222.22
    480500306088.88
    51205003060133.33
    61605003060177.78
    780600306074.00
    81206003060111.11
    91606003060148.15
    下载: 导出CSV

    表  4  球化后钛钽合金粉末化学成分

    Table  4.   Chemical composition of titanium-tantalum alloy powder after spheroidization %

    TiTaHOC
    Bal.29.622.280.80.024
    下载: 导出CSV

    表  5  钛钽合金粉末球化前后的粉末特征

    Table  5.   Particle characteristics of titanium-tantalum alloy powder before and after spheroidization

    粉末流动性(50 g计)/s松装密度/(g·cm−3)振实密度/(g·cm−3)氧含量/%
    原料粉末1.3752.5420.85
    球化粉末6.273.1133.4780.8
    下载: 导出CSV
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  • 收稿日期:  2021-04-07
  • 刊出日期:  2021-06-10

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