Chen Jinmin, Huang Zhiliang, Liu Yu, Wang Shenggao. Synthesizing VO2-xNy Thin Films by Microwave Plasma Enhanced Processes[J]. IRON STEEL VANADIUM TITANIUM, 2007, 28(2): 6-8,26.
Citation:
Chen Jinmin, Huang Zhiliang, Liu Yu, Wang Shenggao. Synthesizing VO2-xNy Thin Films by Microwave Plasma Enhanced Processes[J]. IRON STEEL VANADIUM TITANIUM, 2007, 28(2): 6-8,26.
Chen Jinmin, Huang Zhiliang, Liu Yu, Wang Shenggao. Synthesizing VO2-xNy Thin Films by Microwave Plasma Enhanced Processes[J]. IRON STEEL VANADIUM TITANIUM, 2007, 28(2): 6-8,26.
Citation:
Chen Jinmin, Huang Zhiliang, Liu Yu, Wang Shenggao. Synthesizing VO2-xNy Thin Films by Microwave Plasma Enhanced Processes[J]. IRON STEEL VANADIUM TITANIUM, 2007, 28(2): 6-8,26.
According to the character of VO2 taking phase transition at near 68℃,using the mixture gas of high pure hydrogen and high pure nitrogen as precursor,VO2-xNy thin films are synthesized at low temperature by microwave plasma enhanced procesesses using V2O5 as molecular precursors through coating film on glass slice.The components of synthesized samples are characterized by X-ray diffraction(XRD),the X-ray diffraction pattern indicates that the synthesized samples are nitrogen doped VO2-xNy,the crystallinity of synthesized sample is low and the particle size is small.The measurement of phase transition temperature indicates that the phase transition temperature of VO2-xNy thin films is dropped due to doped nitrogen,the lowest phase transition temperature is 42℃.