Study on Titanium Film Deposited on Steel Belt Surface via Evaporation

The titanium thin film was deposited via electron beam vacuum evaporation on the surface of steel belt by changing the tape travel speed. The phase composition and structure,cross-sectional morphology and film-base bonding force of the titanium film were studied by XRD,FIB,scratch test and other methods. The results show that the titanium film has a close-packed hexagonal structure,and it presents an intense preferred orientation at (002) lattice plane at different tape travel speeds. With the tape travel speed increased from 1 m/min to 4 m/min,the titanium film thickness increases from 744.7 nm to 855.9 nm,and the bonding force between the Ti-film and substrates decreases rapidly and then tends to be gentle. Within the tentative range,the maximum bonding force is 24.78 N.