Preparation of TiN by Reaction between Mg3N2 and TiCl4
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摘要: 采用XRD、SEM、正交试验等手段对Mg3N2与TiCl4反应制备氮化钛工艺及产品收率进行研究。结果表明:TiN可通过TiCl4与Mg3N2反应制备获得, 其产品形貌不规则, 且粒径大小不一, 反应则按进行;影响Ti N产品收率的因子由大到小分别为TiCl4加料速率、温度和TiCl4与Mg摩尔比, TiN产品收率最优的参数为温度600℃、TiCl4加料速率0.1 L/min和TiCl4与Mg摩尔比1, 此时产品收率可达73.7%。Abstract: Preparation of Ti N via reaction of Mg3N2 and TiCl4,and its yield ratio were studied respectively through XRD,SEM and orthogonal experiments.The results show that TiN can be obtained by the reaction of Mg3N2 and TiCl4,and the product is of irregular morphology with nonuniform particle size.The reaction equation can be described as.A decreasing sequence for influence factors of TiN yield rate is the speed of TiCl4 addition,temperature and molar ratio of TiCl4 to Mg,respectively.73.7% of Ti N can be yielded at the optimum conditions of 600 ℃ with 0.1 L/min of TiCl4 addition speed and equimolar of TiCl4 and Mg.
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Key words:
- TiN /
- Mg3N2 /
- TiCl4 /
- orthogonal experiments /
- yield ratio
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