Abstract: The titanium thin film was deposited via electron beam vacuum evaporation on the surface of steel belt by changing the tape travel speed. The phase composition and structure,cross-sectional morphology and film-base bonding force of the titanium film were studied by XRD,FIB,scratch test and other methods. The results show that the titanium film has a close-packed hexagonal structure,and it presents an intense preferred orientation at (002) lattice plane at different tape travel speeds. With the tape travel speed increased from 1 m/min to 4 m/min,the titanium film thickness increases from 744.7 nm to 855.9 nm,and the bonding force between the Ti-film and substrates decreases rapidly and then tends to be gentle. Within the tentative range,the maximum bonding force is 24.78 N.